Life Safety System (LSS)
A high-availability system designed to protect and evacuate the building population in emergencies, including fires, hazardous gas or chemical leakage including other critical events.
Chemical Dispense Module (CDM)
A safe, pure and reliable distribution of acid, caustic or solvent chemicals to critical process especially for semiconductor and photovoltaic industry with high levels of precision and robustness.
Machine Tools Hook Up
Preparation of the incoming power and control signal for the incoming tool to be connected to the production.
Wastewater treatment (WWT) system
A process used to remove contaminants from wastewater and convert it into an effluent prior discharge.
Ultrapure water (UPW) system
An uncommonly stringent specifications, where water is treated to the highest levels of purity for all contaminant types.
Reverse Osmosis Deionization (RODI) water system
A designed system to deliver high quality water under the most stringent requirements of ongoing operation and corrosive conditions.
